產品應用:光電/半導體/電子等產業用設備的零件清洗
(Furnace Quartz Tube, Box/Cassette/SMIF Pod/FOUP/FOSB)
代理:美國AIR PRODUCTS(POLYFLOW)
Ø Tube Cleaner
應用:清洗各式擴散(Diffusion)製程的石英爐管零配件(Furnace Quartz Tube)
型號:Vertical Tube Cleaner、Hórizontal Tube Cleaner
Ø Carrier Cleaner
應用:清洗8” Box/Cassette/SMIF pod, 12” FOUP/FOSB
型號:ULTRA, MS-280, MS-277
Ø Parts Cleaner
應用:清洗各式製程設備的零件
Ø Slurry Delivery System